Atomic Hydrogen Cleaning of Surface Ru Oxide Formed by Extreme Ultraviolet Irradiation of Ru-Capped Multilayer Mirrors in H 2 O Ambience

✍ Scribed by Oizumi, Hiroaki; Izumi, Akira; Motai, Kumi; Nishiyama, Iwao; Namiki, Akira

• Book ID: 126920190
• Publisher: Institute of Pure and Applied Physics
• Year: 2007
• Tongue: English
• Weight: 176 KB
• Volume: 46
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/jjap.46.l633