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Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication

✍ Scribed by Avouris, Phaedon; Hertel, Tobias; Martel, Richard

Book ID
121483525
Publisher
American Institute of Physics
Year
1997
Tongue
English
Weight
298 KB
Volume
71
Category
Article
ISSN
0003-6951

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## Abstract The influence of the voltage applied to the tip of an atomic force microscope (AFM) on the local modification of the surface of CVD‐grown diamond films is studied. By applying a negative voltage to the conductive (highly doped) silicon AFM tip, two kinds of patterns can be created. In t