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Atomic bonds in boron carbon nitride films synthesized by remote plasma-assisted chemical vapor deposition

โœ Scribed by Kimura, Chiharu; Sota, Hiroshi; Aoki, Hidemitsu; Sugino, Takashi


Book ID
122735689
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
588 KB
Volume
18
Category
Article
ISSN
0925-9635

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