✦ LIBER ✦
Atomic Beam-Induced Fluorination of Polyimide and Its Application to Site-Selective Cu Metallization
✍ Scribed by Tagawa, Masahito; Maeda, Ken-ichi; Kajita, Tadashi; Yokota, Kumiko; Akamatsu, Kensuke; Nawafune, Hidemi
- Book ID
- 126155143
- Publisher
- American Chemical Society
- Year
- 2007
- Tongue
- English
- Weight
- 234 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0743-7463
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