๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Atmospheric Pressure Nitrogen Microwave Plasma

โœ Scribed by Lestinska, L.; Foltin, V.; Machala, Z.


Book ID
118180322
Publisher
IEEE
Year
2008
Tongue
English
Weight
382 KB
Volume
36
Category
Article
ISSN
0093-3813

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Microwave Plasma Etching of GaN in Nitro
โœ Frayssinet, E. ;Prystawko, P. ;Leszczynski, M. ;Domagala, J. ;Knap, W. ;Robert, ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 78 KB ๐Ÿ‘ 1 views

Effects of microwave nitrogen plasma etching of gallium nitride epilayers grown on sapphire were studied. The samples were etched with different supplied power ranging from 400 up to 800 W. High resolution X-ray diffraction, atomic force microscopy and infrared reflectivity were used to characterize