✦ LIBER ✦
Atmospheric pressure chemical vapor deposition of SiO2-TiO2 antireflective films from [tri-(tert-butoxy)siloxy-tri-(tert-butoxy)]titanium, [tC4H9O]3Si-O-Ti[OtC4H9]3, which is a single source alkoxide precursor
✍ Scribed by Dr. Chaitanya K. Narula; Dr. Ashima Varshney; Dr. Umar Riaz
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 331 KB
- Volume
- 2
- Category
- Article
- ISSN
- 0948-1907
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