Assessment of thermal expansion coefficient of methylsilsesquioxane thin film

✍ Scribed by B. R. Kim; J. M. Son; M. J. Ko

• Book ID: 105338427
• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 339 KB
• Volume: 44
• Category: Article
• ISSN: 0887-6266
• DOI: 10.1002/polb.20954

✦ Synopsis

Abstract

For the methylsilsesquioxane film whose optical birefringence is almost zero, it was recently reported that its vertical thermal expansion coefficient (CTE) was approximately one order of magnitude larger than the lateral CTE. Though the birefringence is not an absolute predictor of anisotropic behavior, the discrepancy in both the CTEs was so remarkable that it was essential to investigate whether the anisotropy was intrinsic property or not. If the effect of Poisson's ratio is considered in the calculation of the vertical CTE and when elastic modulus measured by surface acoustic wave spectroscopy is used in the assessment of the lateral CTE, both the CTEs are coincident with each other. Therefore, it can be concluded that the discrepancy in the CTEs can be attributed to a higher in‐plane polymer chain orientation but it can also arise from the misleadingly assumed modulus and Poisson's ratio. © 2006 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 44: 3109–3120, 2006