Assessment of subsurface damage in polished II–VI semiconductors by ion channeling

✍ Scribed by D.A. Lucca; C.J. Wetteland; A. Misra; M.J. Klopfstein; M. Nastasi; C.J. Maggiore; J.R. Tesmer

• Book ID: 113822956
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 426 KB
• Volume: 219-220
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2004.01.129