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Assessment of fire protection performance of water mist applied in exhaust ducts for semiconductor fabrication process

✍ Scribed by Yi-Liang Shu; Wei-Jin Jeng; Chen-Wei Chiu; Chiun-Hsun Chen


Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
250 KB
Volume
29
Category
Article
ISSN
0308-0501

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