✦ LIBER ✦
Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques
✍ Scribed by U. Zaghloul; M. Koutsoureli; H. Wang; F. Coccetti; G. Papaioannou; P. Pons; R. Plana
- Book ID
- 108210882
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 465 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0026-2714
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