✦ LIBER ✦
Assessment of conservative weighting scheme in simulating chemical vapour deposition with trace species
✍ Scribed by J.-S. Wu; W.-J. Hsiao; Y.-Y. Lian; K.-C. Tseng
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 872 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0271-2091
- DOI
- 10.1002/fld.609
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