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Assessment of adhesion between thin film and silicon based on a scratch test

✍ Scribed by Jung-Eun Lee; Hyun-Joon Kim; Dae-Eun Kim

Book ID
107624816
Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
791 KB
Volume
24
Category
Article
ISSN
1738-494X

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## Abstract Field‐effect based semiconductor devices for the label‐free detection of molecular interactions represent a promising development for biosensor applications. Recently, several such devices have been presented for the direct electrical detection of nucleic acids and proteins. However, a