✦ LIBER ✦
Assembly of an aperture plate system for projection mask-less lithography
✍ Scribed by M. Mohaupt; R. Eberhardt; C. Damm; T. Peschel; A. Tünnermann; E. Haugeneder; H.-J. Döring; C. Brandstätter
- Book ID
- 108207582
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 224 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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