✦ LIBER ✦

[ASME ASME 2010 International Manufacturing Science and Engineering Conference - Erie, Pennsylvania, USA (October 12–15, 2010)] ASME 2010 International Manufacturing Science and Engineering Conference, Volume 1 - Magnetic Field Assisted Finishing of Silicon MEMS Micro-Pore X-Ray Optics

✍ Scribed by Riveros, Raul E.; Yamaguchi, Hitomi; Boggs, Taylor; Mitsuishi, Ikuyuki; Mitsuda, Kazuhisa; Takagi, Utako; Ezoe, Yuichiro; Ishizu, Kensuke; Moriyama, Teppei

Book ID: 121738417
Publisher: ASMEDC
Year: 2010
Weight: 1010 KB
Category: Article
ISBN: 0791849465
DOI: 10.1115/MSEC2010-34121

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