Arsenic dopant mapping in state-of-the-art semiconductor devices using electron energy-loss spectroscopy

✍ Scribed by Germain Servanton; Roland Pantel

• Book ID: 108210408
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 487 KB
• Volume: 41
• Category: Article
• ISSN: 0968-4328
• DOI: 10.1016/j.micron.2009.10.004