𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Arrays of doped and un-doped semiconductors for sensor applications

✍ Scribed by Taliercio, Thierry; N’Tsame Guilengui, Vilianne; Tournié, Eric


Book ID
118782278
Publisher
Springer
Year
2012
Tongue
English
Weight
359 KB
Volume
109
Category
Article
ISSN
1432-0630

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Dot-array implantation for patterned dop
✍ H.D. Wanzenboeck; C. Ostermaier; A. Gruen; B. Eichinger; M. Karner; E. Bertagnol 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 245 KB

Novel ion beam processing for microelectronic applications has been performed by doping silicon with a focused ion beam tool. A Ga + ion beam with a energy between 10 and 50 keV was used for p-doping of Si. The ion beam could be focused to an effective beam diameter in the sub-micron range with the