Arrangement for deposition of metallic films and their annealing at 80 to 800°K: V L Arbuzov et al, Prib Tekh Eksper, No 2, 1971, 196–199 (in Russian)

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 168 KB
• Volume: 22
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(72)91023-8