Argon-boron double implantation in silicon : Gao Lu-Quan, Zhu Jin-Liang, Cai Ren-Keng and Jiang Xin-Yuan. Vacuum 39(2–4), 195 (1989)

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 125 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90139-e