ArF Photoresist Deformation in Dual Frequency Superimposed Capacitively Coupled Plasma (DFS-CCP) with Different Frequency Combinations

✍ Scribed by Kim, Duck Ho; Cho, Su Hyun; Lee, Nae-Eung; Kwon, Ki Chung

• Book ID: 121481112
• Publisher: Institute of Pure and Applied Physics
• Year: 2005
• Tongue: English
• Weight: 617 KB
• Volume: 44
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.44.5856