✦ LIBER ✦
ArF laser photochemical deposition of amorphous silicon from disilane: Spectroscopic studies and comparison with thermal CVD
✍ Scribed by D. Eres; D.B. Geohegan; D.H. Lowndes; D.N. Mashburn
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 641 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0169-4332
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