Architectural optimization of porous Ultra Low K dielectric material via Finite Element simulations.

✍ Scribed by David Jauffrès; Rémy Dendievel; Marc Verdier

• Book ID: 113937239
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 812 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.08.085