✦ LIBER ✦
Arc plasma jet cleaning of the silicon surface before CoSi2/Si contact formation
✍ Scribed by G. Ya. Pavlov,V. P. Pugachevich,D. G. Gromov,E. B. Kudryashova
- Book ID
- 118290364
- Publisher
- Springer
- Year
- 1996
- Tongue
- English
- Weight
- 371 KB
- Volume
- 63
- Category
- Article
- ISSN
- 1432-0630
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