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Ar+-induced silicon Auger spectra: a probe for the sputter-related collisional and emission processes

✍ Scribed by S. Valeri; R. Verucchi


Book ID
113281493
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
395 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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