✦ LIBER ✦
Approximation of elastic deformations on the surface of a silicon piezoresistive pressure transducer with three-dimensional E-type micromechanical structure
✍ Scribed by L. V. Sokolov; N. A. Agafonova; Yu. V. Naumov
- Publisher
- Springer US
- Year
- 2009
- Tongue
- English
- Weight
- 345 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0543-1972
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