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Approximate solutions of two-way diffusion equations

✍ Scribed by Andersson, F.; Helander, P.; Anderson, D.; Smith, H.; Lisak, M.


Book ID
111645743
Publisher
The American Physical Society
Year
2002
Tongue
English
Weight
86 KB
Volume
65
Category
Article
ISSN
1063-651X

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Approximate similarity solutions to the porous-medium equation, c, = V (c'Vc), are obtained in one and two dimensions. The problems considered arise in the modelling of dopant diffusion in semiconductors, the two-dimensional problems corresponding to diffusion under a mask edge.