✦ LIBER ✦
Approaches to diffusion barrier creation and trench filling for copper interconnection formation
✍ Scribed by D.G. Gromov; A.I. Mochalov; A.G. Klimovitskiy; A.D. Sulimin; E.N. Redichev
- Book ID
- 106019867
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 423 KB
- Volume
- 81
- Category
- Article
- ISSN
- 1432-0630
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