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Applications of mass spectrometer to the measurement of micro leak rates or throughputs

✍ Scribed by Y.Z. Hu; Z.G. Huang

Publisher: Elsevier Science
Year: 1983
Weight: 232 KB
Volume: 48
Category: Article
ISSN: 0020-7381
DOI: 10.1016/0020-7381(83)87020-x

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