✦ LIBER ✦
Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review
✍ Scribed by Chantal Khan Malek; Volker Saile
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 304 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0026-2692
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