Applications of in-line oxygen monitoring to a rapid thermal processing tool: diagnosing gas flow dynamics and silicidation processes

✍ Scribed by E Kondoh; M.R Baklanov; K Maex

• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 232 KB
• Volume: 2
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/s1369-8001(99)00033-5