✦ LIBER ✦
Application of variable shaped electron beam technology to the development of 0.5 micron CMOS technology with extensions to 0.25 micron
✍ Scribed by P.J. Coane; P.J. Rudeck; T. Newman; A.D. Wilson; F.J. Hohn
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 450 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0167-9317
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