Application of ultra-high energy boron implantation for superjunction power (CoolMOS™) devices

✍ Scribed by J. von Borany; M. Friedrich; M. Rüb; G. Deboy; J. Butschke; F. Letzkus

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 304 KB
• Volume: 237
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.04.078