Application of tungsten films for substrate masking in liquid phase epitaxial lateral overgrowth of GaAs

✍ Scribed by D. Dobosz; Z. R. Zytkiewicz; T.T. Piotrowski; E. Kaminska; E. Papis; A. Piotrowska

• Publisher: John Wiley and Sons
• Year: 2003
• Tongue: English
• Weight: 484 KB
• Volume: 38
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.200310034