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Application of time resolved emission techniques within the failure analysis flow

✍ Scribed by Peter Egger; Markus Grützner; Christian Burmer; Fabien Dudkiewicz

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
978 KB
Volume
47
Category
Article
ISSN
0026-2714

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✦ Synopsis

As the number of transistors and metal layers increases, traditional fault isolation techniques are less successful in exactly isolating the failing net or transistor to allow physical failure analysis. One tool to minimize the gap between global fault isolation -by means of emission microscopy or laser based techniques (TIVA, OBIRCH) -and physical root cause analysis is Time Resolved Emission (TRE). This paper presents two case studies illustrating the application of TRE within the failure analysis flow to generate a reasonable physical failure hypothesis.

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