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Application of three-dimensional dislocation dynamics simulation to the STI semiconductor structure

✍ Scribed by S. Izumi; T. Miyake; S. Sakai; H. Ohta

Book ID: 108214341
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 632 KB
Volume: 395
Category: Article
ISSN: 0921-5093
DOI: 10.1016/j.msea.2004.12.001

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