✦ LIBER ✦
Application of the Taguchi’s design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenches
✍ Scribed by Ping Hsun Chen; Colin Yau; Kuang Yung Wu; Steeve Lin; Han Chang Shih
- Book ID
- 108207373
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 364 KB
- Volume
- 77
- Category
- Article
- ISSN
- 0167-9317
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