Application of the partial wave expansion method in 3-D low energy electron beam lithography simulation

✍ Scribed by X. Zianni; D. Velessiotis; N. Glezos; K.N. Trohidou

• Book ID: 114155303
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 225 KB
• Volume: 57-58
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(01)00499-3