Application of spin-coated As2S3 thin films in a high resolution trilayer resist system

✍ Scribed by Singh, B.; Chern, G. C.; Lauks, I.

• Book ID: 120397975
• Publisher: American Institute of Physics
• Year: 1984
• Tongue: English
• Weight: 467 KB
• Volume: 45
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.94974