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Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

✍ Scribed by Ohlídal, Miloslav; Ohlídal, Ivan; Klapetek, Petr; Nečas, David; Buršíková, Vilma


Book ID
122610627
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
373 KB
Volume
18
Category
Article
ISSN
0925-9635

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