Application of non-mass analyzed ion implanter to sub-quarter micron MOSFETs

✍ Scribed by Yoji Kawasaki; Takashi Murakami; Takashi Kuroi; Yoshikazu Ohno; Yasuji Matsui

• Book ID: 114194330
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 567 KB
• Volume: 54
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/s0254-0584(98)00012-1