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Application of living radical polymerization to the synthesis of resist polymers for radiation lithography

✍ Scribed by Takashi Shimizu; Tsuneki Ichikawa

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 235 KB
Volume: 236
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.04.021

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