Application of in-situ ellipsometry to the fabrication of multi-layer optical coatings with sub-nanometre accuracy

✍ Scribed by Svetlana Dligatch; Roger P. Netterfield; Barry Martin

• Book ID: 113936802
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 261 KB
• Volume: 455-456
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2004.02.020