✦ LIBER ✦
Application of high-intensity vacuum ultraviolet light for amorphous silicon film fabrication using a windowless photochemical vapor deposition system
✍ Scribed by Tomo Ueno; Yoshinori Sawado; Takeshi Akiyama; Yoshitaka Iwasaki; Koichi Kuroiwa; Yasuo Tarui
- Book ID
- 115989869
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 352 KB
- Volume
- 169
- Category
- Article
- ISSN
- 0022-3093
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