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Application of design for environment concepts to the semiconductor industry

✍ Scribed by Beu, Laurie ;Mendicino, Laura

Publisher
American Institute of Chemical Engineers
Year
1997
Tongue
English
Weight
679 KB
Volume
16
Category
Article
ISSN
0278-4491

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## Abstract Application of design for environment (DfE) concepts to management of wastewater from chemical mechanical polishing (CMP) processes are presented in this paper. Today, DfE is a prevailing concept and is widely adopted by advanced nations in lieu of the traditional β€œcommand and control”