✦ LIBER ✦
Application of capillary zone electrophoresis with an isotachophoretic initial state to determine anionic impurities on as-polished silicon wafer surfaces
✍ Scribed by J. Boden; K. Bächmann; L. Kotz; L. Fabry; S. Pahlke
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 629 KB
- Volume
- 696
- Category
- Article
- ISSN
- 1873-3778
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