✦ LIBER ✦
Application of an acousto-optic spectrometer for plasma etching process quality control
✍ Scribed by V. Shogun; A. Tyablikov; E. Shelyhmanov; M. Abachev; W. Scharff; T. Wallendorf
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 280 KB
- Volume
- 74-75
- Category
- Article
- ISSN
- 0257-8972
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