Application of a new analytical technique of electron distribution calculations to the profile simulation of a high sensitivity negative electron-beam resist

✍ Scribed by Glezos, N.

• Book ID: 125427399
• Publisher: AVS (American Vacuum Society)
• Year: 1992
• Tongue: English
• Weight: 589 KB
• Volume: 10
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.586335