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Application of a continuous monitoring technique for the deposition of multilayer dielectric films with reproducible characteristics over a wide spectral region

✍ Scribed by A. P. Ovcharenko; E. A. Lupashko; A. P. Sulka


Publisher
Springer US
Year
1982
Tongue
English
Weight
244 KB
Volume
36
Category
Article
ISSN
0021-9037

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