Apparatus for the controlled deposition of multilayer films: T Sawaki et al, Osaka Kogyo Gitujsu, Shikensho Kiho, 16, 1966, 139–143 (in English)

• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 167 KB
• Volume: 17
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(67)91414-5