Apparatus for monitoring film thickness in the course of vacuum deposition: L N Vysochin and V V Kontsur, Soviet Patent, class G 01 b, 11/06, No 539509, claimed 31 July 1970, publd 3 January 1973 (in Russian)

• Book ID: 103467132
• Publisher: Elsevier Science
• Year: 1975
• Tongue: English
• Weight: 176 KB
• Volume: 25
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(75)90794-0