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Apparatus for cathodic sputtering: K A Ramazanov et al, Soviet Patent, class C 23 c, 15/00, No. 382773, claimed 29th April 1971, publd 14th Aug 1973 (in Russian)

Publisher: Elsevier Science
Year: 1975
Tongue: English
Weight: 176 KB
Volume: 25
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(75)91367-6

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📜 SIMILAR VOLUMES

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